JPH0161920U - - Google Patents
Info
- Publication number
- JPH0161920U JPH0161920U JP15577087U JP15577087U JPH0161920U JP H0161920 U JPH0161920 U JP H0161920U JP 15577087 U JP15577087 U JP 15577087U JP 15577087 U JP15577087 U JP 15577087U JP H0161920 U JPH0161920 U JP H0161920U
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- clean air
- air
- supply device
- mixer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims 4
- 229920006395 saturated elastomer Polymers 0.000 claims 3
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Separation Of Particles Using Liquids (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577087U JPH0161920U (en]) | 1987-10-12 | 1987-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15577087U JPH0161920U (en]) | 1987-10-12 | 1987-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161920U true JPH0161920U (en]) | 1989-04-20 |
Family
ID=31433690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15577087U Pending JPH0161920U (en]) | 1987-10-12 | 1987-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161920U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |
-
1987
- 1987-10-12 JP JP15577087U patent/JPH0161920U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |